Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781233 | Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank | Chunhui Dou, Risa Kimura, Toshio Yokoyama | 2023-10-10 |
| 11767606 | Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank | Chunhui Dou, Risa Kimura, Toshio Yokoyama | 2023-09-26 |
| 11600514 | Substrate holding device | Masaki Tomita | 2023-03-07 |
| 11230780 | Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank | Chunhui Dou, Risa Kimura, Toshio Yokoyama | 2022-01-25 |
| 11015261 | Substrate holder and plating apparatus | Yoshitaka Mukaiyama, Toshio Yokoyama, Takuya Tsushima, Tomonori Hirao, Sho Tamura +1 more | 2021-05-25 |
| 10991605 | Substrate processing device, method for controlling substrate processing device, and storage medium storing a program | Takuya Tsushima | 2021-04-27 |
| 10781530 | Cleaning apparatus, plating apparatus using the same, and cleaning method | — | 2020-09-22 |
| 10163672 | Substrate processing device, method for controlling substrate processing device, and storage medium storing programs | Takuya Tsushima | 2018-12-25 |
| 7172683 | Method of managing a plating liquid used in a plating apparatus | Yasushi Isayama, Hiroyuki Ueyama, Hiroyuki Kaneko, Akihisa Hongo, Ryoichi Kimizuka +1 more | 2007-02-06 |
| RE39123 | Plating apparatus | Fumio Kuriyama, Hiroyuki Ueyama, Kenichi Suzuki, Atsushi Chono | 2006-06-13 |
| 6793794 | Substrate plating apparatus and method | Akihisa Hongo, Naoaki Ogure, Hiroyuki Ueyama, Mizuki Nagai, Kenichi Suzuki +3 more | 2004-09-21 |
| 6627066 | Method of measuring the concentration of a leveler in a plating liquid | Yasushi Isayama, Hiroyuki Ueyama, Hiroyuki Kaneko, Akihisa Hongo, Ryoichi Kimizuka +1 more | 2003-09-30 |
| 6379520 | Plating apparatus | Fumio Kuriyama, Hiroyuki Ueyama, Kenichi Suzuki, Atsushi Chono | 2002-04-30 |
| 6365017 | Substrate plating device | Akihisa Hongo, Naoaki Ogure, Hiroyuki Ueyama, Mizuki Nagai, Kenichi Suzuki +3 more | 2002-04-02 |