Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358015 | Substrate processing apparatus and method of machining tubular guard | Takahiro Yamaguchi, Toru Endo, Rikuta AOKI | 2025-07-15 |
| 12327737 | Substrate treating apparatus | Takahiro Yamaguchi, Toshimitsu NAMBA, Sei NEGORO | 2025-06-10 |
| 12145171 | Substrate treating apparatus | Takahiro Yamaguchi | 2024-11-19 |
| 12145179 | Substrate treating apparatus | Takahiro Yamaguchi | 2024-11-19 |
| 12138666 | Substrate processing method and substrate processing apparatus | Toru Endo, Yuta YAMANOUCHI, Yuta SEGAWA, Rikuta AOKI, Tsung Ju LIN | 2024-11-12 |
| 11996302 | Substrate processing apparatus and substrate processing method | Tomoaki Aihara, Takahiro Yamaguchi | 2024-05-28 |
| 11819872 | Substrate processing apparatus and method of machining tubular guard | Takahiro Yamaguchi, Toru Endo, Rikuta AOKI | 2023-11-21 |
| 11810795 | Substrate treating apparatus | Takahiro Yamaguchi, Kenji Kobayashi | 2023-11-07 |
| 11640916 | Substrate processing apparatus and substrate processing method | Takahiro Yamaguchi, Akihisa ENSATSU | 2023-05-02 |
| 11610790 | Substrate processing apparatus | Kenji Kobayashi, Yuta Nishimura, Akito Hatano, Motoyuki Shimai, Toyohide Hayashi | 2023-03-21 |
| 11075095 | Substrate processing apparatus | Kenji Kobayashi, Yuta Nishimura, Akito Hatano, Motoyuki Shimai, Toyohide Hayashi | 2021-07-27 |
| 10403517 | Substrate processing apparatus | Kenji Kobayashi, Yuta Nishimura, Akihiro Nakashima, Motoyuki Shimai, Akito Hatano | 2019-09-03 |
| 10332761 | Substrate processing apparatus | Kenji Kobayashi, Yuta Nishimura, Akito Hatano, Motoyuki Shimai, Toyohide Hayashi | 2019-06-25 |
| 10297476 | Substrate processing apparatus | Akito Hatano, Kenji Kobayashi, Yuta Nishimura, Motoyuki Shimai, Toyohide Hayashi | 2019-05-21 |
| 9805938 | Substrate processing apparatus and substrate processing method | Naozumi Fujiwara, Toru Edo, Yuji Sugahara, Seiji ANO | 2017-10-31 |
| 9793176 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi, Akihiro Nakashima | 2017-10-17 |
| 9460944 | Substrate treating apparatus and method of treating substrate | Naozumi Fujiwara, Toru Edo, Tatsumi Shimomura | 2016-10-04 |