Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417931 | Substrate processing apparatus and substrate processing method | Rikuta AOKI, Daijo MIZUKAMI | 2025-09-16 |
| 11996302 | Substrate processing apparatus and substrate processing method | Takahiro Yamaguchi, Jun SAWASHIMA | 2024-05-28 |
| 11670523 | Substrate processing apparatus | Takashi Ota, Masayuki Hayashi, Jiro Okuda, Kunio Yamada | 2023-06-06 |
| 8640359 | Substrate treating apparatus and substrate treating method | — | 2014-02-04 |
| 8178821 | Substrate treating apparatus | — | 2012-05-15 |
| 7506457 | Substrate treating apparatus | — | 2009-03-24 |
| 6788090 | Method and apparatus for inspecting semiconductor device | — | 2004-09-07 |