Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417931 | Substrate processing apparatus and substrate processing method | Daijo MIZUKAMI, Tomoaki Aihara | 2025-09-16 |
| 12358015 | Substrate processing apparatus and method of machining tubular guard | Takahiro Yamaguchi, Jun SAWASHIMA, Toru Endo | 2025-07-15 |
| 12138666 | Substrate processing method and substrate processing apparatus | Toru Endo, Yuta YAMANOUCHI, Yuta SEGAWA, Tsung Ju LIN, Jun SAWASHIMA | 2024-11-12 |
| 11819872 | Substrate processing apparatus and method of machining tubular guard | Takahiro Yamaguchi, Jun SAWASHIMA, Toru Endo | 2023-11-21 |