Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11237472 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Yohei IKEBE, Takahiro Onoue, Mizuki KATAOKA | 2022-02-01 |
| 10620527 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki | 2020-04-14 |
| 10429728 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki | 2019-10-01 |
| 10295900 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki | 2019-05-21 |
| 10025176 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Toshihiko Orihara, Tsutomu Shoki | 2018-07-17 |
| 10001699 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki | 2018-06-19 |
| 9897909 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki | 2018-02-20 |
| 9581895 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Toshihiko Orihara, Tsutomu Shoki | 2017-02-28 |
| 9507254 | Method of manufacturing substrate with a multilayer reflective film, method of manufacturing a reflective mask blank, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing a semiconductor device | Toshihiko Orihara, Kazuhiro Hamamoto, Hirofumi Kozakai, Tsutomu Shoki | 2016-11-29 |
| 9494851 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki | 2016-11-15 |
| 9348217 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki | 2016-05-24 |
| 8623528 | Method of manufacturing perpendicular magnetic recording medium and perpendicular magnetic recording medium | Teiichiro Umezawa, Masafumi Ishiyama, Tokichiro Sato, Kenji Ayama, Takahiro Onoue | 2014-01-07 |
| 8559131 | Perpendicular magnetic recording media and magnetic disc apparatus | Daisuke Masuda, Chiyo Saito, Iwao Okamoto | 2013-10-15 |
| 8057926 | Perpendicular magnetic recording medium | Kenji Ayama, Tokichiro Sato, Teiichiro Umezawa, Masafumi Ishiyama | 2011-11-15 |
| 7993765 | Perpendicular magnetic recording medium | Kong-Kyeom Kim, Kinobu Osakabe | 2011-08-09 |
| 7972662 | Substrate for information recording medium, information recording medium and process for producing information recording medium | Mikio Ikenishi, Xuelu Zou, Kenji Yamanaka | 2011-07-05 |
| 7357998 | Disk substrate for a perpendicular magnetic recording medium, perpendicular magnetic recording disk and manufacturing methods thereof | Kong-Kyeom Kim | 2008-04-15 |
| 7208238 | Substrate for information recording medium, information recording medium and process for producing information recording medium | Mikio Ikenishi, Xuelu Zou, Kenji Yamanaka | 2007-04-24 |
| 6670055 | Magnetic recording medium and manufacturing method therefor | Hiroshi Tomiyasu, Teiichiro Umezawa, Kenji Ayama, Tomotaka Yokoyama | 2003-12-30 |
| 6287429 | Magnetic recording medium having an improved magnetic characteristic | Keiji Moroishi, Masato Kobayashi, Osamu Nozawa | 2001-09-11 |
| 5954927 | Method of manufacturing magnetic recording medium | Masato Kobayashi, Osamu Nozawa, Hisao Kawai, Keiji Moroishi, Takashi Sato | 1999-09-21 |
| 5746893 | Method of manufacturing magnetic recording medium | Masato Kobayashi, Osamu Nozawa, Hisao Kawai, Keiji Moroishi, Takashi Sato | 1998-05-05 |
| 5640089 | Method and apparatus for surface roughness detection - using a magnetoresistive element | Hisao Kawai | 1997-06-17 |
| 4772904 | Diaphragm drive device | Naoji Otsuka, Masaaki Kuroda | 1988-09-20 |