| 12387912 |
Shield ring mounting using compliant hardware |
James Alan Pixley, John Robert Fairhurst |
2025-08-12 |
| 12165852 |
Cover ring to mitigate carbon contamination in plasma doping chamber |
Vikram M. Bhosle, Timothy J. Miller, Eric D. Hermanson, Christopher J. Leavitt |
2024-12-10 |
| 11557496 |
Load lock with integrated features |
Michael Blanchard, Steven M. Anella, Brant S. Binns, D. Jeffrey Lischer |
2023-01-17 |
| 11538654 |
Thermally isolated captive features for ion implantation systems |
Adam M. McLaughlin |
2022-12-27 |
| 11239040 |
Thermally isolated repeller and electrodes |
Adam M. McLaughlin, Craig R. Chaney |
2022-02-01 |
| 11213891 |
Semiconductor manufacturing device with embedded fluid conduits |
Joshua Abeshaus |
2022-01-04 |
| 11127558 |
Thermally isolated captive features for ion implantation systems |
Adam M. McLaughlin |
2021-09-21 |
| 10854416 |
Thermally isolated repeller and electrodes |
Adam M. McLaughlin, Craig R. Chaney |
2020-12-01 |
| 10486232 |
Semiconductor manufacturing device with embedded fluid conduits |
Joshua Abeshaus |
2019-11-26 |
| 9583309 |
Selective area implant of a workpiece |
Mark R. Amato |
2017-02-28 |
| 9214314 |
Ion beam manipulator |
Jeffrey D. Susser, Sergio Alonso Gonzalez-Palavicini |
2015-12-15 |
