Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10304715 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2019-05-28 |
| 9909213 | Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors | Sergio Fukuda Shoji, Hamid Noorbakhsh, Jong Mun Kim, Ajit Balakrishna | 2018-03-06 |