| 9170246 |
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim +1 more |
2015-10-27 |
| 9097611 |
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
James V. McManus, Steven M. Lurcott |
2015-08-04 |
| 8603252 |
Cleaning of semiconductor processing systems |
Frank Dimeo, Jr., W. Karl Olander, Robert Kaim, Steven E. Bishop, Jeffrey W. Neuner +7 more |
2013-12-10 |
| 8555705 |
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim +1 more |
2013-10-15 |
| 7966879 |
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim +1 more |
2011-06-28 |
| 7955797 |
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
James V. McManus, Steven M. Lurcott |
2011-06-07 |
| 7819981 |
Methods for cleaning ion implanter components |
Frank Dimeo, Jr., W. Karl Olander, Robert Kaim, Steven E. Bishop, Jeffrey W. Neuner +1 more |
2010-10-26 |
| 7694691 |
Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications |
Michael J. Wodjenski |
2010-04-13 |
| 7406979 |
Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications |
Michael J. Wodjenski |
2008-08-05 |
| 7325560 |
In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration |
Jose I. Arno |
2008-02-05 |
| 7063097 |
In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration |
Jose I. Arno |
2006-06-20 |
| 7051749 |
Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications |
Michael J. Wodjenski |
2006-05-30 |
| 6716271 |
Apparatus and method for inhibiting decomposition of germane |
Jose I. Arno, Edward A. Sturm, Luping Wang |
2004-04-06 |
| 6581623 |
Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels |
Kent Carpenter |
2003-06-24 |
| 6561213 |
Fluid distribution system and process, and semiconductor fabrication facility utilizing same |
Luping Wang, Terry A. Tabler |
2003-05-13 |
| 6474076 |
Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing |
Luping Wang, Glenn M. Tom, Steven M. Lurcott, Steven J. Hultquist |
2002-11-05 |
| 6453924 |
Fluid distribution system and process, and semiconductor fabrication facility utilizing same |
Luping Wang, Terry A. Tabler |
2002-09-24 |
| 6360546 |
Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing |
Luping Wang, Glenn M. Tom, Steven M. Lurcott, Steven J. Hultquist |
2002-03-26 |
| 6302139 |
Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels |
— |
2001-10-16 |
| 6253783 |
Method for sub-atmospheric gas delivery with backflow control |
Kurt A. Carlsen, James V. McManus |
2001-07-03 |
| 6155289 |
Method of and system for sub-atmospheric gas delivery with backflow control |
Kurt A. Carlsen, James V. McManus |
2000-12-05 |
| 5980608 |
Throughflow gas storage and dispensing system |
James V. McManus |
1999-11-09 |
