Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6888621 | Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method | Yasuo Araki, Noriaki Tokuda, Masahiko Yasuda, Shinji Mizutani | 2005-05-03 |
| 6583597 | Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same | Keiichi Tanaka, Yukiharu Okubo, Yukio Kakizaki, Yasushi Yoda | 2003-06-24 |
| 6549277 | Illuminance meter, illuminance measuring method and exposure apparatus | Toshihiko Tsuji | 2003-04-15 |