Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8981321 | Charged-particle beam exposure apparatus and method of manufacturing article | — | 2015-03-17 |
| 8829461 | Scanning apparatus, drawing apparatus, and method of manufacturing article | Yusuke Sugiyama | 2014-09-09 |
| 8625077 | Positioning apparatus, exposure apparatus, and device manufacturing method | — | 2014-01-07 |
| 8618516 | Charged-particle beam exposure apparatus and method of manufacturing article | — | 2013-12-31 |
| 8562323 | Imprint apparatus and method for producing article | Nobushige Korenaga, Makoto Miyazaki | 2013-10-22 |
| 7771065 | Optical unit and exposure apparatus having the same | Choshoku Sai, Shigeo Sakino, Katsumi Asada, Shinji Uchida | 2010-08-10 |
| 7738232 | Alignment apparatus | — | 2010-06-15 |
| 7710626 | Optical element driving apparatus | — | 2010-05-04 |
| 7615915 | Spark plug | Takahiro Matsuura | 2009-11-10 |
| 7530795 | Fluid control mechanism | — | 2009-05-12 |
| 7453623 | Reflecting mirror and exposure apparatus using the same | Shinji Uchida, Choshoku Sai, Katsumi Asada, Shigeo Sakino | 2008-11-18 |
| 7444817 | Optical micromotor, micropump using same and microvalve using same | — | 2008-11-04 |
| 7443619 | Optical element holding apparatus, exposure apparatus and device manufacturing method | Shigeo Sakino, Shinji Uchida, Choshoku Sai, Katsumi Asada | 2008-10-28 |
| 7352121 | Spark plug | Takahiro Matsuura | 2008-04-01 |
| 6688932 | Method for manufacturing spark plug and caulking metallic mold | Hiroaki Nasu, Wataru Matsutani, Yoshito Uemura, Makoto Sugimoto | 2004-02-10 |
| 6559579 | Alumina-based sintered body insulator for spark plugs | Kenji Nunome, Makoto Sugimoto, Kuniharu Tanaka, Katsura Matsubara, Yoshihiro Yamamoto +1 more | 2003-05-06 |
| 6359679 | Positioning device, exposure device, and device manufacturing method | Kotaro Akutsu | 2002-03-19 |
| 6265816 | Spark plug, insulator for spark plug and process for fabricating the insulator | Hiroyuki Tanabe | 2001-07-24 |
| 6214150 | Method of transfer printing a ceramic spark plug insulator | Makoto Sugimoto | 2001-04-10 |
| 6028376 | Positioning apparatus and exposure apparatus using the same | Eiji Osanai, Kotaro Akutsu | 2000-02-22 |
| 6008882 | Stage device, method of controlling same, and exposure apparatus using said stage device | Kotaro Akutsu | 1999-12-28 |
| 5976674 | Transfer sheet, a method of transferring a figuration therefrom and a ceramic product on which the figuration is printed | Makoto Sugimoto | 1999-11-02 |
| 5939852 | Stage feeding device | Kotaro Akutsu, Eiji Osanai | 1999-08-17 |
| 4658647 | Accelerometer | Yasuo Shintani, Kazuhiro Sakuma, Hisashi Yabe | 1987-04-21 |