Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635570 | PECVD and CVD processes for WNx deposition | Carl Galewski, Claude A. Sands, Lawrence D. Matthysse, Thomas E. Seidel | 2003-10-21 |
| 6130159 | Apparatus and methods for minimizing as-deposited stress in tungsten silicide films | Sien G. Kang, John Y. Adachi, David Badt, Edward L. Sill | 2000-10-10 |
| 6036564 | Method and device for inspecting an electron gun | Pieter Scholten | 2000-03-14 |
| 5963836 | Methods for minimizing as-deposited stress in tungsten silicide films | Sien G. Kang, John Y. Adachi, David Badt, Edward L. Sill | 1999-10-05 |