Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6130159 | Apparatus and methods for minimizing as-deposited stress in tungsten silicide films | Sien G. Kang, John Y. Adachi, Edward L. Sill, Hector Velasco | 2000-10-10 |
| 5963836 | Methods for minimizing as-deposited stress in tungsten silicide films | Sien G. Kang, John Y. Adachi, Edward L. Sill, Hector Velasco | 1999-10-05 |