Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11802220 | Silica-based slurry for selective polishing of carbon-based films | Brian Reiss, Fernando HUNG LOW, Michael M. Morrow | 2023-10-31 |
| 11597854 | Method to increase barrier film removal rate in bulk tungsten slurry | William J. Ward, III, Matthew E. Carnes, Ji Cui | 2023-03-07 |
| 11043151 | Surface treated abrasive particles for tungsten buff applications | Ji Cui, Kevin P. Dockery, Pankaj Kumar Singh, Hung-Tsung HUANG, Chih-Hsien Chien | 2021-06-22 |
| 10522341 | Composition and method for removing residue from chemical-mechanical planarization substrate | Ji Cui | 2019-12-31 |
| 10066126 | Tungsten processing slurry with catalyst | Kevin P. Dockery, Matthew E. Carnes, Glenn Whitener | 2018-09-04 |
| 9771496 | Tungsten-processing slurry with cationic surfactant and cyclodextrin | Kevin P. Dockery, Lin Fu, Tina Li | 2017-09-26 |
| 9631122 | Tungsten-processing slurry with cationic surfactant | Kevin P. Dockery, Lin Fu | 2017-04-25 |