| 9537444 |
Methods and systems for characterizing photovoltaic cell and module performance at various stages in the manufacturing process |
John M. Schmidt, Leonid A. Vasilyev, James E. Hudson, Kyle Lu |
2017-01-03 |
| 8299416 |
High speed quantum efficiency measurement apparatus utilizing solid state lightsource |
Mark Alan Arbore, David L. Klein, Leonid A. Vasilyev, John M. Schmidt, James E. Hudson |
2012-10-30 |
| 8278937 |
High speed detection of shunt defects in photovoltaic and optoelectronic devices |
Leonid A. Vasilyev, John M. Schmidt, James E. Hudson |
2012-10-02 |
| 7719294 |
Systems configured to perform a non-contact method for determining a property of a specimen |
Amin Samsavar, John M. Schmidt, Rainer Schierle, Thomas G. Miller, Zhiwei Xu +3 more |
2010-05-18 |
| 7538333 |
Contactless charge measurement of product wafers and control of corona generation and deposition |
Amin Samsavar, John M. Schmidt, Rainer Schierle, Thomas G. Miller, Zhiwei Xu +3 more |
2009-05-26 |
| 7397254 |
Methods for imperfect insulating film electrical thickness/capacitance measurement |
Xiafang Zhang, Zhiwei Xu, Jianou Shi, Quoc Vu, Thomas G. Miller |
2008-07-08 |
| 7358748 |
Methods and systems for determining a property of an insulating film |
Thomas G. Miller, Amin Samsavar, Zhiwei Xu, Patrick Stevens |
2008-04-15 |
| 7248062 |
Contactless charge measurement of product wafers and control of corona generation and deposition |
Amin Samsavar, John M. Schmidt, Rainer Schierle, Thomas G. Miller, Zhiwei Xu +3 more |
2007-07-24 |
| 7230443 |
Non-contact mobile charge measurement with leakage band-bending and dipole correction |
Min-Su Fung, Roger L. Verkuil, William Howland |
2007-06-12 |
| 7075318 |
Methods for imperfect insulating film electrical thickness/capacitance measurement |
Xiafang Zhang, Zhiwei Xu, Jianou Shi, Bao Vu, Thomas G. Miller |
2006-07-11 |
| 7064565 |
Methods and systems for determining an electrical property of an insulating film |
Zhiwei Xu, Thomas G. Miller, Jianou Shi |
2006-06-20 |
| 7012438 |
Methods and systems for determining a property of an insulating film |
Thomas G. Miller, Amin Samsavar, Zhiwei Xu, Patrick Stevens |
2006-03-14 |
| 6937050 |
Non-contact mobile charge measurement with leakage band-bending and dipole correction |
Min-Su Fung, Roger L. Verkuil, William Howland |
2005-08-30 |
| 6771092 |
Non-contact mobile charge measurement with leakage band-bending and dipole correction |
Min-Su Fung, Roger L. Verkuil, William Howland |
2004-08-03 |
| 6734696 |
Non-contact hysteresis measurements of insulating films |
Thomas G. Miller |
2004-05-11 |
| 6522158 |
Non-contact mobile charge measurement with leakage band-bending and dipole correction |
Min-Su Fung, Roger L. Verkuil, William Howland |
2003-02-18 |
| 6448804 |
Contactless total charge measurement with corona |
Tom Miller, Roger L. Verkuil |
2002-09-10 |
| 6335630 |
Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona charge |
Tom Miller, Roger L. Verkuil |
2002-01-01 |
| 6202029 |
Non-contact electrical conduction measurement for insulating films |
Roger L. Verkuil, Tom Miller |
2001-03-13 |
| 6191605 |
Contactless method for measuring total charge of an insulating layer on a substrate using corona charge |
Tom Miller, Roger L. Verkuil |
2001-02-20 |
| 6121783 |
Method and apparatus for establishing electrical contact between a wafer and a chuck |
Meindert Kleefstra, Roger L. Verkuil, Robert A. Miles |
2000-09-19 |
| 6097196 |
Non-contact tunnelling field measurement for a semiconductor oxide layer |
Roger L. Verkuil, Tom Miller |
2000-08-01 |
| 6060709 |
Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer |
Roger L. Verkuil, Tom Miller |
2000-05-09 |
| 5594247 |
Apparatus and method for depositing charge on a semiconductor wafer |
Roger L. Verkuil, Thomas G. Miller |
1997-01-14 |