Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7230443 | Non-contact mobile charge measurement with leakage band-bending and dipole correction | Min-Su Fung, Gregory S. Horner, William Howland | 2007-06-12 |
| 6937050 | Non-contact mobile charge measurement with leakage band-bending and dipole correction | Min-Su Fung, Gregory S. Horner, William Howland | 2005-08-30 |
| 6771092 | Non-contact mobile charge measurement with leakage band-bending and dipole correction | Min-Su Fung, Gregory S. Horner, William Howland | 2004-08-03 |
| 6522158 | Non-contact mobile charge measurement with leakage band-bending and dipole correction | Min-Su Fung, Gregory S. Horner, William Howland | 2003-02-18 |
| 6448804 | Contactless total charge measurement with corona | Tom Miller, Gregory S. Horner | 2002-09-10 |
| 6335630 | Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona charge | Tom Miller, Gregory S. Horner | 2002-01-01 |
| 6228665 | Method of measuring oxide thickness during semiconductor fabrication | Jonathan H. Griffith, Ronald L. Smith | 2001-05-08 |
| 6202029 | Non-contact electrical conduction measurement for insulating films | Gregory S. Horner, Tom Miller | 2001-03-13 |
| 6191605 | Contactless method for measuring total charge of an insulating layer on a substrate using corona charge | Tom Miller, Gregory S. Horner | 2001-02-20 |
| 6121783 | Method and apparatus for establishing electrical contact between a wafer and a chuck | Gregory S. Horner, Meindert Kleefstra, Robert A. Miles | 2000-09-19 |
| 6104206 | Product wafer junction leakage measurement using corona and a kelvin probe | — | 2000-08-15 |
| 6097196 | Non-contact tunnelling field measurement for a semiconductor oxide layer | Gregory S. Horner, Tom Miller | 2000-08-01 |
| 6091257 | Vacuum activated backside contact | Meindert Kleefstra | 2000-07-18 |
| 6072320 | Product wafer junction leakage measurement using light and eddy current | — | 2000-06-06 |
| 6060709 | Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer | Gregory S. Horner, Tom Miller | 2000-05-09 |
| 5834941 | Mobile charge measurement using corona charge and ultraviolet light | — | 1998-11-10 |
| 5767691 | Probe-oxide-semiconductor method and apparatus for measuring oxide charge on a semiconductor wafer | — | 1998-06-16 |
| 5767693 | Method and apparatus for measurement of mobile charges with a corona screen gun | — | 1998-06-16 |
| 5650731 | Photovoltaic oxide charge measurement probe technique | Min-Su Fung, Bob H. Yun | 1997-07-22 |
| 5644223 | Uniform density charge deposit source | — | 1997-07-01 |
| 5594247 | Apparatus and method for depositing charge on a semiconductor wafer | Gregory S. Horner, Thomas G. Miller | 1997-01-14 |
| 5500607 | Probe-oxide-semiconductor method and apparatus for measuring oxide charge on a semiconductor wafer | — | 1996-03-19 |
| 5498974 | Contactless corona-oxide-semiconductor Q-V mobile charge measurement method and apparatus | Min-Su Fung | 1996-03-12 |
| 5485091 | Contactless electrical thin oxide measurements | — | 1996-01-16 |
| 5442297 | Contactless sheet resistance measurement method and apparatus | — | 1995-08-15 |