Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241018 | Wear test apparatus | Paolo R. Zafred | 2019-03-26 |
| 7304490 | In-situ wafer and probe desorption using closed loop heating | Brian R. Bobrzynski | 2007-12-04 |
| 7282941 | Method of measuring semiconductor wafers with an oxide enhanced probe | — | 2007-10-16 |
| 7250313 | Method of detecting un-annealed ion implants | — | 2007-07-31 |
| 7230443 | Non-contact mobile charge measurement with leakage band-bending and dipole correction | Min-Su Fung, Roger L. Verkuil, Gregory S. Horner | 2007-06-12 |
| 7190186 | Method and apparatus for determining concentration of defects and/or impurities in a semiconductor wafer | Brian R. Bobrzynski | 2007-03-13 |
| 7063992 | Semiconductor substrate surface preparation using high temperature convection heating | Michael J. Adams, James Healy | 2006-06-20 |
| 7026837 | Method and apparatus for determining the dielectric constant of a low permittivity dielectric on a semiconductor wafer | Christine E. Kalnas | 2006-04-11 |
| 7023231 | Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof | Robert J. Hillard, Steven Hung | 2006-04-04 |
| 7007408 | Method and apparatus for removing and/or preventing surface contamination of a probe | James Healy | 2006-03-07 |
| 7005307 | Apparatus and method for detecting soft breakdown of a dielectric layer of a semiconductor wafer | Robert J. Hillard | 2006-02-28 |
| 6972582 | Apparatus and method for measuring semiconductor wafer electrical properties | Robert Mazur | 2005-12-06 |
| 6937050 | Non-contact mobile charge measurement with leakage band-bending and dipole correction | Min-Su Fung, Roger L. Verkuil, Gregory S. Horner | 2005-08-30 |
| 6894519 | Apparatus and method for determining electrical properties of a semiconductor wafer | — | 2005-05-17 |
| 6842029 | Non-invasive electrical measurement of semiconductor wafers | — | 2005-01-11 |
| 6836139 | Method and apparatus for determining defect and impurity concentration in semiconducting material of a semiconductor wafer | — | 2004-12-28 |
| 6803780 | Sample chuck with compound construction | Michael J. Adams, William J. Alexander, III | 2004-10-12 |
| 6788076 | Apparatus for determining doping concentration of a semiconductor wafer | — | 2004-09-07 |
| 6771092 | Non-contact mobile charge measurement with leakage band-bending and dipole correction | Min-Su Fung, Roger L. Verkuil, Gregory S. Horner | 2004-08-03 |
| 6741093 | Method of determining one or more properties of a semiconductor wafer | Robert J. Hillard | 2004-05-25 |
| 6657454 | High speed threshold voltage and average surface doping measurements | — | 2003-12-02 |
| 6632691 | Apparatus and method for determining doping concentration of a semiconductor wafer | — | 2003-10-14 |
| 6522158 | Non-contact mobile charge measurement with leakage band-bending and dipole correction | Min-Su Fung, Roger L. Verkuil, Gregory S. Horner | 2003-02-18 |