| 10241018 |
Wear test apparatus |
Paolo R. Zafred |
2019-03-26 |
| 7304490 |
In-situ wafer and probe desorption using closed loop heating |
Brian R. Bobrzynski |
2007-12-04 |
| 7282941 |
Method of measuring semiconductor wafers with an oxide enhanced probe |
— |
2007-10-16 |
| 7250313 |
Method of detecting un-annealed ion implants |
— |
2007-07-31 |
| 7230443 |
Non-contact mobile charge measurement with leakage band-bending and dipole correction |
Min-Su Fung, Roger L. Verkuil, Gregory S. Horner |
2007-06-12 |
| 7190186 |
Method and apparatus for determining concentration of defects and/or impurities in a semiconductor wafer |
Brian R. Bobrzynski |
2007-03-13 |
| 7063992 |
Semiconductor substrate surface preparation using high temperature convection heating |
Michael J. Adams, James Healy |
2006-06-20 |
| 7026837 |
Method and apparatus for determining the dielectric constant of a low permittivity dielectric on a semiconductor wafer |
Christine E. Kalnas |
2006-04-11 |
| 7023231 |
Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof |
Robert J. Hillard, Steven Hung |
2006-04-04 |
| 7007408 |
Method and apparatus for removing and/or preventing surface contamination of a probe |
James Healy |
2006-03-07 |
| 7005307 |
Apparatus and method for detecting soft breakdown of a dielectric layer of a semiconductor wafer |
Robert J. Hillard |
2006-02-28 |
| 6972582 |
Apparatus and method for measuring semiconductor wafer electrical properties |
Robert Mazur |
2005-12-06 |
| 6937050 |
Non-contact mobile charge measurement with leakage band-bending and dipole correction |
Min-Su Fung, Roger L. Verkuil, Gregory S. Horner |
2005-08-30 |
| 6894519 |
Apparatus and method for determining electrical properties of a semiconductor wafer |
— |
2005-05-17 |
| 6842029 |
Non-invasive electrical measurement of semiconductor wafers |
— |
2005-01-11 |
| 6836139 |
Method and apparatus for determining defect and impurity concentration in semiconducting material of a semiconductor wafer |
— |
2004-12-28 |
| 6803780 |
Sample chuck with compound construction |
Michael J. Adams, William J. Alexander, III |
2004-10-12 |
| 6788076 |
Apparatus for determining doping concentration of a semiconductor wafer |
— |
2004-09-07 |
| 6771092 |
Non-contact mobile charge measurement with leakage band-bending and dipole correction |
Min-Su Fung, Roger L. Verkuil, Gregory S. Horner |
2004-08-03 |
| 6741093 |
Method of determining one or more properties of a semiconductor wafer |
Robert J. Hillard |
2004-05-25 |
| 6657454 |
High speed threshold voltage and average surface doping measurements |
— |
2003-12-02 |
| 6632691 |
Apparatus and method for determining doping concentration of a semiconductor wafer |
— |
2003-10-14 |
| 6522158 |
Non-contact mobile charge measurement with leakage band-bending and dipole correction |
Min-Su Fung, Roger L. Verkuil, Gregory S. Horner |
2003-02-18 |