RH

Robert J. Hillard

SM Solid State Measurements: 11 patents #2 of 19Top 15%
Overall (All Time): #469,250 of 4,157,543Top 15%
11
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7327155 Elastic metal gate MOS transistor for surface mobility measurement in semiconductor materials 2008-02-05
7295022 Method and system for automatically determining electrical properties of a semiconductor wafer or sample Louison Tan 2007-11-13
7037734 Method and apparatus for determining generation lifetime of product semiconductor wafers 2006-05-02
7023231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof William Howland, Steven Hung 2006-04-04
7005307 Apparatus and method for detecting soft breakdown of a dielectric layer of a semiconductor wafer William Howland 2006-02-28
6991948 Method of electrical characterization of a silicon-on-insulator (SOI) wafer 2006-01-31
6879176 Conductance-voltage (GV) based method for determining leakage current in dielectrics 2005-04-12
6741093 Method of determining one or more properties of a semiconductor wafer William Howland 2004-05-25
6492827 Non-invasive electrical measurement of semiconductor wafers Robert Mazur 2002-12-10
6150832 Noncontact capacitance measuring device Robert Mazur 2000-11-21
5023561 Apparatus and method for non-invasive measurement of electrical properties of a dielectric layer in a semiconductor wafer 1991-06-11