Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191125 | Removing metal contamination from surfaces of a processing chamber | Jengyi Yu, Samantha Tan, Seongjun Heo, Siva Kanakasabapathy | 2025-01-07 |
| 12062538 | Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement | Jengyi Yu, Samantha Tan, Liu-Yang Yang, Chen-Wei Liang, Boris Volosskiy +4 more | 2024-08-13 |
| 11842888 | Removing metal contamination from surfaces of a processing chamber | Jengyi Yu, Samantha Tan, Seongjun Heo, Siva Kanakasabapathy | 2023-12-12 |
| 10554017 | Method and device concerning III-nitride edge emitting laser diode of high confinement factor with lattice matched cladding layer | Jung Han, Yufeng Li | 2020-02-04 |