Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822107 | Chemical vapor deposition precursors for deposition of copper | Thomas H. Baum, Chongying Xu | 2004-11-23 |
| 6645860 | Adhesion promotion method for CVD copper metallization in IC applications | Lawrence J. Charneski, Tue Nguyen | 2003-11-11 |
| 6379748 | Tantalum amide precursors for deposition of tantalum nitride on a substrate | Thomas H. Baum | 2002-04-30 |
| 6355562 | Adhesion promotion method for CVD copper metallization in IC applications | Lawrence J. Charneski, Tue Nguyen | 2002-03-12 |
| 6319565 | Stable hydride source compositions for manufacture of semiconductor devices and structures | Michael A. Todd, Thomas H. Baum | 2001-11-20 |
| 6284652 | Adhesion promotion method for electro-chemical copper metallization in IC applications | Lawrence J. Charneski, Tuc Van NGUYEN | 2001-09-04 |
| 6265222 | Micro-machined thin film hydrogen gas sensor, and method of making and using the same | Frank Dimeo, Jr. | 2001-07-24 |
| 6245151 | Liquid delivery system comprising upstream pressure control means | Dennis Brestovansky | 2001-06-12 |
| 6178925 | Burst pulse cleaning method and apparatus for liquid delivery system | Edward A. Sturm, Craig Ragaglia | 2001-01-30 |
| 6146608 | Stable hydride source compositions for manufacture of semiconductor devices and structures | Michael A. Todd, Thomas H. Baum | 2000-11-14 |
| 6102993 | Copper precursor composition and process for manufacture of microelectronic device structures | Thomas H. Baum, Chongying Xu | 2000-08-15 |
| 6099653 | Liquid reagent delivery system with constant thermal loading of vaporizer | Thomas H. Baum | 2000-08-08 |
| 6015917 | Tantalum amide precursors for deposition of tantalum nitride on a substrate | Thomas H. Baum | 2000-01-18 |
| 6006582 | Hydrogen sensor utilizing rare earth metal thin film detection element | Thomas H. Baum | 1999-12-28 |
| 6005127 | Antimony/Lewis base adducts for Sb-ion implantation and formation of antimonide films | Michael A. Todd, Thomas H. Baum | 1999-12-21 |
| 6001172 | Apparatus and method for the in-situ generation of dopants | W. Karl Olander, Michael A. Todd, Timothy E. Glassman | 1999-12-14 |
| 5919522 | Growth of BaSrTiO.sub.3 using polyamine-based precursors | Thomas H. Baum, Gregory T. Stauf, Peter S. Kirlin, Duncan W. Brown, Robin A. Gardiner +1 more | 1999-07-06 |
| 5916359 | Alkane and polyamine solvent compositions for liquid delivery chemical vapor deposition | Thomas H. Baum | 1999-06-29 |
| 5902639 | Method of forming bismuth-containing films by using bismuth amide compounds | Timothy E. Glassman, Thomas H. Baum | 1999-05-11 |
| 5859274 | Anhydrous mononuclear tris(.beta.-diketonate) bismuth compositions for deposition of bismuth-containing films, and method of making the same | Thomas H. Baum, Margaret Chappuis | 1999-01-12 |