| 7973546 |
In-line electron beam test system |
Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more |
2011-07-05 |
| 7919972 |
Integrated substrate transfer module |
Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Benjamin M. Johnston |
2011-04-05 |
| 7746088 |
In-line electron beam test system |
Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more |
2010-06-29 |
| 7535238 |
In-line electron beam test system |
Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more |
2009-05-19 |
| 7355418 |
Configurable prober for TFT LCD array test |
Matthias Brunner, Shinichi Kurita, Ralf Schmid, Benjamin M. Johnston, Paul Bocian +1 more |
2008-04-08 |
| 7330021 |
Integrated substrate transfer module |
Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Benjamin M. Johnston |
2008-02-12 |
| 6433348 |
Lithography using multiple pass raster-shaped beam |
Jan M. Chabala |
2002-08-13 |
