| 10570510 |
Periphery purge shutter and flow control systems and methods |
Bojan Mitrovic, Ian Kunsch |
2020-02-25 |
| 10364509 |
Alkyl push flow for vertical flow rotating disk reactors |
Michael Murphy, Richard A. Hoffman, Jonathan Cruel, Lev Kadinski, Jeffrey C. Ramer |
2019-07-30 |
| 10167554 |
Wafer processing with carrier extension |
Bojan Mitrovic, Guanghua Wei, Ajit Paranjpe |
2019-01-01 |
| 10134617 |
Wafer carrier having thermal cover for chemical vapor deposition systems |
Alexander I. Gurary |
2018-11-20 |
| 10099185 |
Enhanced enclosures for acoustical gas concentration sensing and flow control |
Ray Logue, Don N. Sirota, Karthik Karkala, Christopher A. Morath, Arindam Sinharoy |
2018-10-16 |
| 9982362 |
Density-matching alkyl push flow for vertical flow rotating disk reactors |
Bojan Mitrovic, Alexander I. Gurary, William E. Quinn |
2018-05-29 |
| 9938621 |
Methods of wafer processing with carrier extension |
Bojan Mitrovic, Guanghua Wei, Ajit Paranjpe |
2018-04-10 |
| 9748113 |
Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system |
George D. Papasouliotis, Daewon Kwon |
2017-08-29 |
| 9653340 |
Heated wafer carrier profiling |
Vadim Boguslavskiy, Joshua Mangum, Matthew King, Earl Marcelo, Alexander I. Gurary +2 more |
2017-05-16 |
| 9593434 |
Alkyl push flow for vertical flow rotating disk reactors |
Michael Murphy, Richard A. Hoffman, Jonathan Cruel, Lev Kadinski, Jeffrey C. Ramer |
2017-03-14 |
| 9303319 |
Gas injection system for chemical vapor deposition using sequenced valves |
William E. Quinn |
2016-04-05 |
| 9273395 |
Gas treatment systems |
Bojan Mitrovic, Alex Gurary |
2016-03-01 |
| 8980000 |
Density-matching alkyl push flow for vertical flow rotating disk reactors |
Bojan Mitrovic, Alex Gurary, William E. Quinn |
2015-03-17 |
| 8958061 |
Heated wafer carrier profiling |
Vadim Boguslavskiy, Joshua Mangum, Matthew King, Earl Marcelo, Alexander I. Gurary +2 more |
2015-02-17 |
| 8815709 |
Chemical vapor deposition with energy input |
Joshua Mangum, William E. Quinn |
2014-08-26 |
| 8603248 |
System and method for varying wafer surface temperature via wafer-carrier temperature offset |
Alex Gurary, Richard A. Hoffman, Jonathan Cruel |
2013-12-10 |
| 8441653 |
Apparatus and method for batch non-contact material characterization |
Dong Seung Lee, Mikhail Belousov, William E. Quinn |
2013-05-14 |
| 8287646 |
Gas treatment systems |
Bojan Mitrovic, Alex Gurary |
2012-10-16 |
| 8198605 |
Apparatus and method for batch non-contact material characterization |
Dong Seung Lee, Mikhail Belousov, William E. Quinn |
2012-06-12 |
| 8152923 |
Gas treatment systems |
Bojan Mitrovic, Alex Gurary |
2012-04-10 |
| 8092599 |
Movable injectors in rotating disc gas reactors |
Piero Sferlazzo, Alexander I. Gurary, William E. Quinn, Steve Ting |
2012-01-10 |
| 8022372 |
Apparatus and method for batch non-contact material characterization |
Dong Seung Lee, Mikhail Belousov, William E. Quinn |
2011-09-20 |
| 6001183 |
Wafer carriers for epitaxial growth processes |
Alexander I. Gurary, Douglas A. Collins, Richard A. Stall |
1999-12-14 |
| 5438585 |
Unstable resonator semiconductor laser |
Stephen D. Hersee |
1995-08-01 |
| 5275686 |
Radial epitaxial reactor for multiple wafer growth |
Christian F. Schaus, Kang Zheng, Shang-Zhu Sun, David P. Kopchik |
1994-01-04 |