Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887881 | Lithographic apparatus, substrate table, and non-uniform coating method | Bruce Tirri, Ping Zhou, David Hart PETERSON, Mehmet Ali AKBAS, Ryan Mayer +1 more | 2024-01-30 |
| 8629973 | Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation | Richard Carl Zimmerman, Hendrikus Robertus Marie Van Greevenbroek, Peter Kochersperger, Todd R. Downey, Szilard Istvan Csiszar +2 more | 2014-01-14 |
| 7333176 | De-focus uniformity correction | Roberto B. Wiener, Alexander Kremer, Richard Carl Zimmerman | 2008-02-19 |
| 7173688 | Method for calculating an intensity integral for use in lithography systems | Roberto B. Wiener, Alexander Kremer, Richard Carl Zimmerman | 2007-02-06 |