| 7625692 |
Yield and line width performance for liquid polymers and other materials |
Emir Gurer, Murthy Krishna, Reese Reynolds, John Salois, Royal Cherry |
2009-12-01 |
| 7255975 |
Yield and line width performance for liquid polymers and other materials |
Emir Gurer, Murthy Krishna, Reese Reynolds, John Salois, Royal Cherry |
2007-08-14 |
| 7208262 |
Yield and line width performance for liquid polymers and other materials |
Emir Gurer, Murthy Krishna, Reese Reynolds, John Salois, Royal Cherry |
2007-04-24 |
| 6977098 |
Method of uniformly coating a substrate |
Emir Gurer, Tom Zhong, John Lewellen, Robert P. Mandal, James C. Grambow +3 more |
2005-12-20 |
| 6955720 |
Plasma deposition of spin chucks to reduce contamination of Silicon wafers |
Emir Gurer, Richard Savage |
2005-10-18 |
| 6911091 |
Environment exchange control for material on a wafer surface |
Emir Gurer, Tom Zhong, Kevin Golden, John Lewellen, Scott C. Wackerman +1 more |
2005-06-28 |
| 6905547 |
Method and apparatus for flexible atomic layer deposition |
Ana R. Londergan, Thomas E. Seidel, Lawrence D. Matthysse |
2005-06-14 |
| 6844027 |
Environment exchange control for material on a wafer surface |
Emir Gurer, Tom Zhong, Kevin Golden, John Lewellen, Scott C. Wackerman +1 more |
2005-01-18 |
| 6780461 |
Environment exchange control for material on a wafer surface |
Emir Gurer, Tom Zhong, Kevin Golden, John Lewellen, Scott C. Wackerman +1 more |
2004-08-24 |
| 6669779 |
Yield and line width performance for liquid polymers and other materials |
Emir Gurer, Murthy Krishna, Reese Reynolds, John Salois, Royal Cherry |
2003-12-30 |
| 6468586 |
Environment exchange control for material on a wafer surface |
Emir Gurer, Tom Zhong, Kevin Golden, John Lewellen, Scott C. Wackerman +1 more |
2002-10-22 |
| 6254936 |
Environment exchange control for material on a wafer surface |
Emir Gurer, Tom Zhong, Kevin Golden, John Lewellen, Reese Reynolds +1 more |
2001-07-03 |
| 6248171 |
Yield and line width performance for liquid polymers and other materials |
Emir Gurer, Murthy Krishna, Reese Reynolds, John Salois, Royal Cherry |
2001-06-19 |
| 6242364 |
Plasma deposition of spin chucks to reduce contamination of silicon wafers |
Emir Gurer, Richard Savage |
2001-06-05 |
| 4566026 |
Integrated circuit bimetal layer |
Jon A. Roberts |
1986-01-21 |