Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911091 | Environment exchange control for material on a wafer surface | Emir Gurer, Ed C. Lee, Tom Zhong, John Lewellen, Scott C. Wackerman +1 more | 2005-06-28 |
| 6844027 | Environment exchange control for material on a wafer surface | Emir Gurer, Ed C. Lee, Tom Zhong, John Lewellen, Scott C. Wackerman +1 more | 2005-01-18 |
| 6780461 | Environment exchange control for material on a wafer surface | Emir Gurer, Ed C. Lee, Tom Zhong, John Lewellen, Scott C. Wackerman +1 more | 2004-08-24 |
| 6468586 | Environment exchange control for material on a wafer surface | Emir Gurer, Ed C. Lee, Tom Zhong, John Lewellen, Scott C. Wackerman +1 more | 2002-10-22 |
| 6254936 | Environment exchange control for material on a wafer surface | Emir Gurer, Ed C. Lee, Tom Zhong, John Lewellen, Reese Reynolds +1 more | 2001-07-03 |
| 5618751 | Method of making single-step trenches using resist fill and recess | Pai-Hung Pan, Kevin J. Stewart, Alan C. Thomas | 1997-04-08 |