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Patterning device support, lithographic apparatus, and method of controlling patterning device temperature |
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| 9891540 |
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Franciscus Godefridus Casper Bijnen |
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| 9766557 |
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature |
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| 9632433 |
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature |
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Reticle cooling system in a lithographic apparatus |
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| 8730476 |
Tunable wavelength illumination system |
Arie Jeffrey Den Boef, Harry Sewell, Keith Andersen, Sanjeev Singh |
2014-05-20 |
| 8508736 |
Tunable wavelength illumination system |
Arie Jeffrey Den Boef, Harry Sewell, Keith William ANDRESEN, Sanjeev Singh |
2013-08-13 |
| RE42650 |
Fluid gauge proximity sensor and method of operating same using a modulated fluid flow |
Daniel N. Galburt, Joseph H. Lyons |
2011-08-30 |
| 7134321 |
Fluid gauge proximity sensor and method of operating same using a modulated fluid flow |
Daniel N. Galburt, Joseph H. Lyons |
2006-11-14 |
| 7021121 |
Gas gauge proximity sensor with a modulated gas flow |
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Differential displacement measuring interferometer |
— |
1993-02-16 |
| 5028137 |
Angular displacement measuring interferometer |
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1991-07-02 |