Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9070639 | Shrinkage of critical dimensions in a semiconductor device by selective growth of a mask material | Volker Grimm | 2015-06-30 |
| 9006906 | DRAM cell based on conductive nanochannel plate | Wolfgang Buchholtz, Petra Hetzer | 2015-04-14 |
| 8946019 | Semiconductor device comprising a buried capacitor formed in the contact level | Tino Hertzsch | 2015-02-03 |
| 8925396 | Method and system for particles analysis in microstructure devices by isolating particles | Petra Hetzer, Matthias Schaller | 2015-01-06 |
| 8785271 | DRAM cell based on conductive nanochannel plate | Wolfgang Buchholtz, Petra Hetzer | 2014-07-22 |
| 8748199 | In-situ measurement of feature dimensions | — | 2014-06-10 |
| 8598579 | Test structure for ILD void testing and contact resistance measurement in a semiconductor device | Dirk Utess | 2013-12-03 |
| 8569171 | Mask-based silicidation for FEOL defectivity reduction and yield boost | — | 2013-10-29 |
| 8563426 | Shrinkage of contact elements and vias in a semiconductor device by incorporating additional tapering material | Tino Hertzsch | 2013-10-22 |
| 8546915 | Integrated circuits having place-efficient capacitors and methods for fabricating the same | — | 2013-10-01 |
| 8541311 | Integrated circuit fabrication methods utilizing embedded hardmask layers for high resolution patterning | — | 2013-09-24 |
| 8518721 | Dopant marker for precise recess control | Peter Baars | 2013-08-27 |
| 8508053 | Chip package including multiple sections for reducing chip package interaction | — | 2013-08-13 |
| 8497583 | Stress reduction in chip packaging by a stress compensation region formed around the chip | Michael Grillberger, Heike Berthold, Katrin Reiche | 2013-07-30 |
| 8435885 | Method and system for extracting samples after patterning of microstructure devices | Petra Hetzer, Matthias Schaller | 2013-05-07 |
| 8420479 | Semiconductor device comprising a capacitor formed in the contact level | — | 2013-04-16 |
| 8236645 | Integrated circuits having place-efficient capacitors and methods for fabricating the same | — | 2012-08-07 |
| 8202739 | Dopant marker for precise recess control | Peter Baars | 2012-06-19 |
| 7441446 | Method and apparatus for determining surface characteristics by using SPM techniques with acoustic excitation and real-time digitizing | Holm Geisler, Ehrenfried Zschech | 2008-10-28 |