Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9609731 | Systems and methods for synchronous operation of debris-mitigation devices | Raymond Merrill, Jr., Natale M. Ceglio | 2017-03-28 |
| 9585236 | Sn vapor EUV LLP source system for EUV lithography | Natale M. Ceglio, Richard Levesque | 2017-02-28 |
| 8895946 | Source-collector modules for EUV lithography employing a GIC mirror and a LPP source | Natale M. Ceglio, Jacques Kools, Giuseppe Valsecchi, Fabio Zocchi, Riccardo Binda | 2014-11-25 |
| 8746975 | Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography | Giovanni Bianucci, Fabio Zocchi, Robert Banham, Marco Pedrali, Boris Grek +5 more | 2014-06-10 |
| 8731139 | Evaporative thermal management of grazing incidence collectors for EUV lithography | Boris Grek, Natale M. Ceglio | 2014-05-20 |
| 4870648 | X-ray beamsplitter | Natale M. Ceglio, Andrew M. Hawryluk, Troy W. Barbee, Jr. | 1989-09-26 |