Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394646 | In-chamber low-profile sensor assembly | Wenwei Qiao | 2025-08-19 |
| 12216015 | MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing | David Peterson, Philip Allan Kraus, Amir Bayati | 2025-02-04 |
| 12176188 | Optical spectrum sensor wafer or robot for chamber condition monitoring | Wenwei Qiao | 2024-12-24 |
| 12066285 | Hoist and winch cable angle sensor | — | 2024-08-20 |
| 12062529 | Microwave resonator array for plasma diagnostics | David Peterson | 2024-08-13 |
| 12009235 | In-chamber low-profile sensor assembly | Wenwei Qiao | 2024-06-11 |
| 11920994 | Surface acoustic wave sensor assembly | — | 2024-03-05 |
| 11901875 | Surface acoustic wave sensor assembly | — | 2024-02-13 |
| 11874189 | MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing | David Peterson, Philip Allan Kraus, Amir Bayati | 2024-01-16 |
| 11735401 | In-situ optical chamber surface and process sensor | Upendra Ummethala, Steven E. Babayan, Lei Lian | 2023-08-22 |
| 11499869 | Optical wall and process sensor with plasma facing sensor | Upendra Ummethala | 2022-11-15 |
| 11346875 | Micro resonator array sensor for detecting wafer processing parameters | Upendra Ummethala | 2022-05-31 |
| 11268807 | Hoist and winch cable angle sensor | — | 2022-03-08 |
| 11209398 | High quality factor embedded resonator wafers | Surajit Kumar, Upendra Ummethala | 2021-12-28 |
| 11114286 | In-situ optical chamber surface and process sensor | Upendra Ummethala, Steven E. Babayan, Lei Lian | 2021-09-07 |
| 11009538 | Micro resonator array system | Upendra Ummethala, Andrew Kunil Choe | 2021-05-18 |
| 10901021 | Method for detecting wafer processing parameters with micro resonator array sensors | Upendra Ummethala | 2021-01-26 |
| 9989358 | Hoist and winch cable angle sensor | — | 2018-06-05 |
| 9016665 | Hoist health and usage monitoring system and components thereof | Alan F. Leingang, Dave Lopes, Dennis Manuel Robertson, Christopher Sanden, Odd Harald Steen Eriksen +1 more | 2015-04-28 |
| 8359932 | Systems and methods for mounting landing gear strain sensors | Odd Harald Steen Eriksen, Shuwen Guo, Lawrence Joseph Stang | 2013-01-29 |
| 7994940 | Mechanical latch locking detection sensors | Alexander Grichener | 2011-08-09 |
| 7843363 | Mechanical latch locking detection sensors | Alexander Grichener | 2010-11-30 |
| 7834514 | Wireless surface acoustic wave-based proximity sensor, sensing system and method | Alexander Spivak | 2010-11-16 |
| 7784359 | Coriolis effect mass flow meter and gyroscope | Alexander Spivak, Christopher Sanden, Odd Harald Steen Eriksen | 2010-08-31 |
| 7603915 | Force balanced impeller flow meter for mass flow rate control | Alexander Spivak, Odd Harald Steen Eriksen, Felix Goldenberg, Alexander Grichener, Christopher Sanden +1 more | 2009-10-20 |