Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394646 | In-chamber low-profile sensor assembly | Chuang-Chia Lin | 2025-08-19 |
| 12176188 | Optical spectrum sensor wafer or robot for chamber condition monitoring | Chuang-Chia Lin | 2024-12-24 |
| 12009235 | In-chamber low-profile sensor assembly | Chuang-Chia Lin | 2024-06-11 |
| 7397039 | Real-time compensation of mechanical position error in pattern generation or imaging applications | Bruce Baxter, Benyamin Buller, Huei Kao | 2008-07-08 |