Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360451 | Method of manufacturing semiconductor device | Tsunehiro Nishi, Hyunwoo KIM, Jinkyun LEE, Junil Kim, Hyuntaek Oh +2 more | 2025-07-15 |
| 12112948 | Method of manufacturing integrated circuit device using a metal-containing photoresist composition | Soyeon Yoo, Sooyoung Choi, Tsunehiro Nishi, Kwangsub Yoon, Brian J. Cardineau +1 more | 2024-10-08 |
| 11923209 | Substrate processing apparatus and substrate processing method | Hyunwoong Hwang, Seok-Won Heo, Hyunwoo KIM | 2024-03-05 |
| 11599021 | Photoresist compositions and methods for fabricating semiconductor devices using the same | Tsunehiro Nishi, Brian J. Cardineau, Sangyoon Woo, Jason K. Stowers, Soo Young Choi | 2023-03-07 |
| 11327398 | Photoresist compositions and methods for fabricating semiconductor devices using the same | Tsunehiro Nishi, Brian J. Cardineau, Sangyoon Woo, Jason K. Stowers, Soo Young Choi | 2022-05-10 |
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Kuntack Lee, Yong-Jhin Cho, Sunghyun Park, Hyosan Lee +2 more | 2021-11-30 |
| 10353290 | Photoresist composition for extreme ultraviolet and method of forming photoresist pattern using the same | Cheol-Hong Park, Hyunwoo KIM, Sang-Yoon Woo, Hyejin JEON | 2019-07-16 |
| 9564325 | Methods of fabricating a semiconductor device | Cheol-Hong Park, Ki-Jeong Kim, Hyunwoo KIM, Hyosung Lee | 2017-02-07 |
| 9158204 | Photo lithographic rinse solution and method of manufacturing a semiconductor device using the same | Su Min Kim, Hyunwoo KIM, Hyojin Yun | 2015-10-13 |