Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416861 | Organometallic photoresist developer compositions and processing methods | Kai-Li Jiang, Lauren B. McQuade, Jeremy T. Anderson, Stephen T. Meyers, Michael Kocsis +1 more | 2025-09-16 |
| 12360454 | Stabilized interfaces of inorganic radiation patterning compositions on substrates | Shu-Hao Chang, Jason K. Stowers, Michael Kocsis, Peter De Schepper | 2025-07-15 |
| 12276913 | Organotin oxide hydroxide patterning compositions, precursors, and patterning | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +1 more | 2025-04-15 |
| 12129271 | Organotin clusters, solutions of organotin clusters, and application to high resolution patterning | Stephen T. Meyers, Kai-Li Jiang, William Earley, Jeremy T. Anderson | 2024-10-29 |
| 12112948 | Method of manufacturing integrated circuit device using a metal-containing photoresist composition | Chawon Koh, Soyeon Yoo, Sooyoung Choi, Tsunehiro Nishi, Kwangsub Yoon +1 more | 2024-10-08 |
| 12105418 | Stable solutions of monoalkyl tin alkoxides and their hydrolysis and condensation products | Kai-Li Jiang, Stephen T. Meyers, Lauren B. McQuade, Jeremy T. Anderson, Benjamin L. Clark +2 more | 2024-10-01 |
| 12071449 | Tin dodecamers and radiation patternable coatings with strong EUV absorption | William Earley, Stephen T. Meyers, Kai-Li Jiang, Jeremy T. Anderson | 2024-08-27 |
| 11988959 | Organometallic solution based high resolution patterning compositions and corresponding methods | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +2 more | 2024-05-21 |
| 11868046 | Stable solutions of monoalkyl tin alkoxides and their hydrolysis and condensation products | Kai-Li Jiang, Stephen T. Meyers, Lauren B. McQuade, Jeremy T. Anderson, Benjamin L. Clark +2 more | 2024-01-09 |
| 11809081 | Organotin oxide hydroxide patterning compositions, precursors, and patterning | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +1 more | 2023-11-07 |
| 11754924 | Organotin oxide hydroxide patterning compositions, precursors, and patterning | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +1 more | 2023-09-12 |
| 11740559 | Apparatuses for reducing metal residue in edge bead region from metal-containing resists | Mollie Waller, Kai-Li Jiang, Alan J. Telecky, Stephen T. Meyers, Benjamin L. Clark | 2023-08-29 |
| 11599021 | Photoresist compositions and methods for fabricating semiconductor devices using the same | Chawon Koh, Tsunehiro Nishi, Sangyoon Woo, Jason K. Stowers, Soo Young Choi | 2023-03-07 |
| 11537048 | Organotin oxide hydroxide patterning compositions, precursors, and patterning | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +1 more | 2022-12-27 |
| 11500284 | Organometallic solution based high resolution patterning compositions and corresponding methods | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +2 more | 2022-11-15 |
| 11392028 | Tin dodecamers and radiation patternable coatings with strong EUV absorption | William Earley, Stephen T. Meyers, Kai-Li Jiang, Jeremy T. Anderson | 2022-07-19 |
| 11392029 | Organometallic solution based high resolution patterning compositions and corresponding methods | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +2 more | 2022-07-19 |
| 11327398 | Photoresist compositions and methods for fabricating semiconductor devices using the same | Chawon Koh, Tsunehiro Nishi, Sangyoon Woo, Jason K. Stowers, Soo Young Choi | 2022-05-10 |
| 11300876 | Stable solutions of monoalkyl tin alkoxides and their hydrolysis and condensation products | Kai-Li Jiang, Stephen T. Meyers, Lauren B. McQuade, Jeremy T. Anderson, Benjamin L. Clark +2 more | 2022-04-12 |
| 11187986 | Apparatuses for reducing metal residue in edge bead region from metal-containing resists | Mollie Waller, Kai-Li Jiang, Alan J. Telecky, Stephen T. Meyers, Benjamin L. Clark | 2021-11-30 |
| 11098070 | Organotin clusters, solutions of organotin clusters, and application to high resolution patterning | Stephen T. Meyers, Kai-Li Jiang, William Earley, Jeremy T. Anderson | 2021-08-24 |
| 10775696 | Organotin oxide hydroxide patterning compositions, precursors, and patterning | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +1 more | 2020-09-15 |
| 10732505 | Organotin oxide hydroxide patterning compositions, precursors, and patterning | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +1 more | 2020-08-04 |
| 10642153 | Organometallic solution based high resolution patterning compositions and corresponding methods | Stephen T. Meyers, Jeremy T. Anderson, Joseph B. Edson, Kai-Li Jiang, Douglas A. Keszler +2 more | 2020-05-05 |
| 10627719 | Methods of reducing metal residue in edge bead region from metal-containing resists | Mollie Waller, Kai-Li Jiang, Alan J. Telecky, Stephen T. Meyers, Benjamin L. Clark | 2020-04-21 |