Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497534 | Aperture system of electron beam apparatus, electron beam exposure apparatus, and electron beam exposure apparatus system | Hyun Ho Lee, Jong Mun Park, Jin Choi, Shuichi Tamamushi | 2019-12-03 |
| 9892884 | Exposure apparatus and method of manufacturing semiconductor device | Rae-won Yi, Dong Gun Lee, Su-Young Lee | 2018-02-13 |
| 9671686 | Exposure methods using e-beams and methods of manufacturing masks and semiconductor devices therefrom | Jin Sun Karoline Choi, In-Kyun Shin, Sang-Hee Lee | 2017-06-06 |
| 9116438 | Method of correcting flare and method of preparing extreme ultra violet mask | Young Mi Lee, In-Sung Kim, Ji-Soong Park, Jae-pil Shin | 2015-08-25 |
| 7927767 | Reflective photomasks and methods of determining layer thicknesses of the same | Chang-kwon Hwangbo, Sung-min Huh, Hee Kang | 2011-04-19 |