| 9897554 |
Method of inspecting surface and method of inspecting photomask using the same |
Ji Hoon Na, Dong Gun Lee, Byung-Gook Kim |
2018-02-20 |
| 9892884 |
Exposure apparatus and method of manufacturing semiconductor device |
Byoung-Sup Ahn, Dong Gun Lee, Su-Young Lee |
2018-02-13 |
| 9529960 |
Photolithography patterning system using feature parameters |
Jin Choi, Heung Suk Oh, Sin-jeung Park |
2016-12-27 |
| 9017904 |
Methods of providing photolithography patterns using feature parameters |
Jin Choi, Heung Suk Oh, Sin-jeung Park |
2015-04-28 |
| 8465884 |
Electron beam depicting pattern design, photomask, methods of depicting and fabricating photomask, and method of fabricating semiconductor device using the same |
Jin Woo CHOI, Sang-Hee Lee |
2013-06-18 |
