Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7265025 | Method for filling trench and relief geometries in semiconductor structures | Dietmar Temmler, Daniel Koehler, Matthias Foerster | 2007-09-04 |
| 6984556 | Method of forming an isolation layer and method of manufacturing a trench capacitor | Christian Drabe, Jana Haensel, Anke Krasemann, Thomas Morgenstern, Torsten Schneider +1 more | 2006-01-10 |
| 6245640 | Method for fabricating a semiconductor structure | Wilhelm Claussen, Klaus Penner, Mirko Vogt, Hans-Peter Sperlich | 2001-06-12 |