Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8123860 | Apparatus for cyclical depositing of thin films | Randhir P. S. Thakur, Alfred Mak, Ming Xi, Walter Glenn, Ahmad Khan +2 more | 2012-02-28 |
| 7175713 | Apparatus for cyclical deposition of thin films | Randhir P. S. Thakur, Alfred Mak, Ming Xi, Walter Glenn, Ahmad Khan +2 more | 2007-02-13 |
| 6221221 | Apparatus for providing RF return current path control in a semiconductor wafer processing system | Michael Rosenstein, Bradley O. Stimson, Jianming Fu, Praburam Gopalraja | 2001-04-24 |