Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261064 | Tank, substrate processing apparatus, and method of using the tank | Tomohiko Muta, Daiki Shibata, Makoto Ogata | 2025-03-25 |
| 11960209 | Developing treatment method and developing treatment apparatus | Hiroshi Ichinomiya | 2024-04-16 |
| 11848189 | Substrate processing method, recording medium and substrate processing apparatus | Takahiro Shiozawa, Hiroki TADATOMO, Hiroshi Ichinomiya | 2023-12-19 |
| 11823918 | Substrate processing method and substrate processing apparatus | — | 2023-11-21 |
| 11720026 | Developing treatment method, computer storage medium and developing treatment apparatus | Kousuke Yoshihara, Kouichirou Tanaka, Hiroshi Ichinomiya | 2023-08-08 |
| 11508589 | Substrate processing method, substrate processing apparatus and recording medium | Kouichirou Tanaka, Hiroshi Ichinomiya, Masahiro Fukuda | 2022-11-22 |
| 11488846 | Substrate processing method and substrate processing apparatus | — | 2022-11-01 |
| 9972512 | Liquid processing method, memory medium and liquid processing apparatus | Takafumi Niwa, Shogo Takahashi, Hiroshi Nishihata, Yuichi Terashita, Teruhiko Kodama | 2018-05-15 |
| 9786488 | Liquid processing method, memory medium and liquid processing apparatus | Takafumi Niwa, Shogo Takahashi, Hiroshi Nishihata, Yuichi Terashita, Teruhiko Kodama | 2017-10-10 |