Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261064 | Tank, substrate processing apparatus, and method of using the tank | Tomohiko Muta, Akiko Kai, Makoto Ogata | 2025-03-25 |
| 11860542 | Liquid treatment apparatus and method of adjusting temperature of treatment liquid | Takashi Yamauchi, Kohei Kawakami | 2024-01-02 |
| 11561473 | Liquid treatment apparatus and method of adjusting temperature of treatment liquid | Takashi Yamauchi, Kohei Kawakami | 2023-01-24 |
| 10400760 | Liquid delivery method, liquid delivery system, and computer-readable storage medium | Takashi Sasa, Katsuya Hashimoto, Takeshi Ohto | 2019-09-03 |
| 10036379 | Processing liquid supplying apparatus, processing liquid supplying method and storage medium | Takashi Sasa | 2018-07-31 |