TM

Tomohiko Muta

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,323,896 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12261064 Tank, substrate processing apparatus, and method of using the tank Daiki Shibata, Akiko Kai, Makoto Ogata 2025-03-25
12094737 Substrate processing apparatus, control method, and computer-readable storage medium Masayuki Kajiwara, Katsunori Ichino, Daisuke Ishimaru, Takuya Tajiri, Atsushi Yamamoto +5 more 2024-09-17
10655619 Pump, pump device, and liquid supply system Takashi Sasa, Daisuke Ishimaru, Takahiro Okubo, Tomoyuki Yumoto 2020-05-19