Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261064 | Tank, substrate processing apparatus, and method of using the tank | Daiki Shibata, Akiko Kai, Makoto Ogata | 2025-03-25 |
| 12094737 | Substrate processing apparatus, control method, and computer-readable storage medium | Masayuki Kajiwara, Katsunori Ichino, Daisuke Ishimaru, Takuya Tajiri, Atsushi Yamamoto +5 more | 2024-09-17 |
| 10655619 | Pump, pump device, and liquid supply system | Takashi Sasa, Daisuke Ishimaru, Takahiro Okubo, Tomoyuki Yumoto | 2020-05-19 |