Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7234477 | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces | John M. de Larios, Mike Ravkin, Carl Woods, Fritz Redeker, James P. Garcia | 2007-06-26 |
| 6866051 | Megasonic substrate processing module | Randolph Treur, Michael Ravkin | 2005-03-15 |
| 6851436 | Substrate processing using a fluid re-circulation system in a wafer scrubbing system | Michael Ravkin, John deLarios, Katrina Mikhaylichenko, James P. Garcia | 2005-02-08 |