Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424480 | Detecting wafer status in a wafer chuck assembly | Claudiu Valentin Puha | 2025-09-23 |
| 12027409 | Detecting wafer status in a wafer chuck assembly | Claudiu Valentin Puha | 2024-07-02 |
| 11508609 | Wafer chuck assembly | Claudiu Valentin Puha | 2022-11-22 |
| 10971388 | Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal | Robert Lynden Braendle, Cian Sweeney | 2021-04-06 |
| 10811299 | Wafer chuck assembly | Claudiu Valentin Puha, Robert Marshall Stowell | 2020-10-20 |
| 10563298 | Wafer chuck with aerodynamic design for turbulence reduction | Craig P. Stephens, Matt Kanetomi, Joseph Richardson, Chris Veazey | 2020-02-18 |
| 10373858 | Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal | Robert Lynden Braendle, Cian Sweeney | 2019-08-06 |
| 9732416 | Wafer chuck with aerodynamic design for turbulence reduction | Craig P. Stephens, Matt Kanetomi, Joseph Richardson, Chris Veazey | 2017-08-15 |
| 9685353 | Apparatus and method for edge bevel removal of copper from silicon wafers | Kousik Ganesan, Shantinath Ghongadi, Tariq Majid, Steven T. Mayer | 2017-06-20 |
| 8419964 | Apparatus and method for edge bevel removal of copper from silicon wafers | Kousik Ganesan, Shanthinath Ghongadi, Tariq Majid, Steven T. Mayer | 2013-04-16 |
| 8172646 | Magnetically actuated chuck for edge bevel removal | Jingbin Feng, Kousik Ganesan | 2012-05-08 |
| 6254673 | Auxillary vacuum apparatus and method for crystal growth | Aaron W. Johnson, Randall Spradlin | 2001-07-03 |
| 6189176 | High pressure gas cleaning purge of a dry process vacuum pump | Kenneth C. Ivey | 2001-02-20 |
| 6090222 | High pressure gas cleaning purge of a dry process vacuum pump | Kenneth C. Ivey | 2000-07-18 |
| 6051064 | Apparatus for weighing crystals during Czochralski crystal growing | — | 2000-04-18 |
| 6030451 | Two camera diameter control system with diameter tracking for silicon ingot growth | Masahiko Baba | 2000-02-29 |