Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278204 | Pattern decomposition lithography techniques | Charles H. Wallace, Hossam A. Abdallah, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka | 2025-04-15 |
| 11107786 | Pattern decomposition lithography techniques | Charles H. Wallace, Hossam A. Abdallah, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka | 2021-08-31 |
| 10636700 | Metal via processing schemes with via critical dimension (CD) control for back end of line (BEOL) interconnects and the resulting structures | Paul A. Nyhus, Mohit K. HARAN, Charles H. Wallace, Deepak S. Rao, Alexander F. Kaplan | 2020-04-28 |
| 10490519 | Pattern decomposition lithography techniques | Charles H. Wallace, Hossam A. Abdallah, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka | 2019-11-26 |
| 10409152 | Pattern decomposition lithography techniques | Charles H. Wallace, Hossam A. Abdallah, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka | 2019-09-10 |
| 10319625 | Metal via processing schemes with via critical dimension (CD) control for back end of line (BEOL) interconnects and the resulting structures | Paul A. Nyhus, Mohit K. HARAN, Charles H. Wallace, Deepak S. Rao, Alexander F. Kaplan | 2019-06-11 |
| 9558947 | Pattern decomposition lithography techniques | Charles H. Wallace, Hossam M. Abdallah, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka | 2017-01-31 |
| 7470492 | Process window-based correction for photolithography masks | Shem Ogadhoh, Joseph E. Brandenburg | 2008-12-30 |