Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7171637 | Translation generation for a mask pattern | — | 2007-01-30 |
| 7154109 | Method and apparatus for producing electromagnetic radiation | — | 2006-12-26 |
| 6897157 | Method of repairing an opaque defect on a mask with electron beam-induced chemical etching | Ted Liang | 2005-05-24 |
| 6774990 | Method to inspect patterns with high resolution photoemission | Ted Liang, Edita Tejnil | 2004-08-10 |
| 6627362 | Photolithographic mask fabrication | Shoudeng Liang, Barry Lieberman | 2003-09-30 |
| 6506526 | Method and apparatus for a reflective mask that is inspected at a first wavelength and exposed during semiconductor manufacturing at a second wavelength | Edita Tejnil | 2003-01-14 |
| 6410193 | Method and apparatus for a reflective mask that is inspected at a first wavelength and exposed during semiconductor manufacturing at a second wavelength | Edita Tejnil | 2002-06-25 |
| 6352803 | Coatings on reflective mask substrates | William M. Tong, John S. Taylor, Scott D. Hector, Pawitter Mangat, Patrick G. Kofron +1 more | 2002-03-05 |