| 7171637 |
Translation generation for a mask pattern |
— |
2007-01-30 |
| 7154109 |
Method and apparatus for producing electromagnetic radiation |
— |
2006-12-26 |
| 6897157 |
Method of repairing an opaque defect on a mask with electron beam-induced chemical etching |
Ted Liang |
2005-05-24 |
| 6774990 |
Method to inspect patterns with high resolution photoemission |
Ted Liang, Edita Tejnil |
2004-08-10 |
| 6627362 |
Photolithographic mask fabrication |
Shoudeng Liang, Barry Lieberman |
2003-09-30 |
| 6506526 |
Method and apparatus for a reflective mask that is inspected at a first wavelength and exposed during semiconductor manufacturing at a second wavelength |
Edita Tejnil |
2003-01-14 |
| 6410193 |
Method and apparatus for a reflective mask that is inspected at a first wavelength and exposed during semiconductor manufacturing at a second wavelength |
Edita Tejnil |
2002-06-25 |
| 6352803 |
Coatings on reflective mask substrates |
William M. Tong, John S. Taylor, Scott D. Hector, Pawitter Mangat, Patrick G. Kofron +1 more |
2002-03-05 |
