Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905801 | High performance EUV mask | Pei-Yang Yan, Guojing Zhang | 2005-06-14 |
| 6627362 | Photolithographic mask fabrication | Alan Stivers, Barry Lieberman | 2003-09-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905801 | High performance EUV mask | Pei-Yang Yan, Guojing Zhang | 2005-06-14 |
| 6627362 | Photolithographic mask fabrication | Alan Stivers, Barry Lieberman | 2003-09-30 |