Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6905801 | High performance EUV mask | Pei-Yang Yan, Guojing Zhang | 2005-06-14 | $24,999,000 |
| 6627362 | Photolithographic mask fabrication | Alan Stivers, Barry Lieberman | 2003-09-30 | $25,999,000 |