Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646720 | Euv reticle carrier with removable pellicle | Arun Ramamoorthy, Hsing-Chien Ma | 2003-11-11 |
| 6627362 | Photolithographic mask fabrication | Alan Stivers, Shoudeng Liang | 2003-09-30 |
| 4694424 | Combined nucleate-replicate single wall domain generate structure | Guido Galli, Alexander A. Grillo | 1987-09-15 |