Patents per Year
Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7410733 | Dual-layer EUV mask absorber with trenches having opposing sidewalls that are straight and parallel | Pei-Yang Yan, Scott R. Chegwidden | 2008-08-12 | $20,410,000 |
| 7102127 | Mechanized retractable pellicles and methods of use | Arun Ramamoorthy | 2006-09-05 | $13,820,000 |
| 6913706 | Double-metal EUV mask absorber | Pei-Yang Yan, Scott R. Chegwidden | 2005-07-05 | $31,328,000 |
| 6734445 | Mechanized retractable pellicles and methods of use | Arun Ramamoorthy | 2004-05-11 | $33,328,000 |
| 6646720 | Euv reticle carrier with removable pellicle | Arun Ramamoorthy, Barry Lieberman | 2003-11-11 | $43,556,000 |
| 4645562 | Double layer photoresist technique for side-wall profile control in plasma etching processes | Kuan-Yang Liao, Kuang-Yeh Chang | 1987-02-24 |