Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7410733 | Dual-layer EUV mask absorber with trenches having opposing sidewalls that are straight and parallel | Pei-Yang Yan, Hsing-Chien Ma | 2008-08-12 |
| 6913706 | Double-metal EUV mask absorber | Pei-Yang Yan, Hsing-Chien Ma | 2005-07-05 |