Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897157 | Method of repairing an opaque defect on a mask with electron beam-induced chemical etching | Alan Stivers | 2005-05-24 |
| 6774990 | Method to inspect patterns with high resolution photoemission | Alan Stivers, Edita Tejnil | 2004-08-10 |
| 6720118 | Enhanced inspection of extreme ultraviolet mask | Pei-Yang Yan, Guojing Zhang | 2004-04-13 |
| 6583068 | Enhanced inspection of extreme ultraviolet mask | Pei-Yang Yan, Guojing Zhang | 2003-06-24 |