Issued Patents All Time
Showing 51–73 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7074317 | Method for fabricating trench capacitors for large scale integrated semiconductor memories | Albert Birner, Dirk Schumann | 2006-07-11 |
| 7056802 | Method for fabricating a trench capacitor with an insulation collar which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory cell | — | 2006-06-06 |
| 7049241 | Method for forming a trench in a layer or a layer stack on a semiconductor wafer | Uwe Schroeder, Tobias Mono | 2006-05-23 |
| 7045855 | Semiconductor device and corresponding fabrication method | Björn Fischer, Stefan Jakschik, Till Schlosser | 2006-05-16 |
| 7041568 | Method for the production of a self-adjusted structure on a semiconductor wafer | Thomas Hecht, Jorn Lutzen, Bernhard Sell | 2006-05-09 |
| 7009900 | Circuit arrangement for reading out, evaluating and reading in again a charge state into a memory cell | Bernhard Sell | 2006-03-07 |
| 7005240 | Method for forming a hard mask in a layer on a planar device | Dirk Manger | 2006-02-28 |
| 6919255 | Semiconductor trench structure | Albert Birner, Thomas Hecht, Lars Heineck, Stephan Kudelka, Jorn Lutzen +2 more | 2005-07-19 |
| 6903454 | Contact spring configuration for contacting a semiconductor wafer and method for producing a contact spring configuration | Albert Birner, Martin Franosch | 2005-06-07 |
| 6878600 | Method for fabricating trench capacitors and semiconductor device with trench capacitors | Albert Birner, Martin Franosch | 2005-04-12 |
| 6873000 | Storage cell field and method of producing the same | Till Schlosser | 2005-03-29 |
| 6864188 | Semiconductor configuration and process for etching a layer of the semiconductor configuration using a silicon-containing etching mask | — | 2005-03-08 |
| 6863769 | Configuration and method for making contact with the back surface of a semiconductor substrate | Albert Birner, Martin Franosch, Volker Lehmann, Jorn Lutzen | 2005-03-08 |
| 6861312 | Method for fabricating a trench structure | Albert Birner, Joern Luetzen | 2005-03-01 |
| 6821861 | Method for fabricating an electrode arrangement for charge storage | Thomas Hecht | 2004-11-23 |
| 6812094 | Method for roughening a surface of a semiconductor substrate | Annalisa Cappellani | 2004-11-02 |
| 6806037 | Method for producing and/or renewing an etching mask | Thomas Hecht, Bernhard Sell | 2004-10-19 |
| 6780337 | Method for trench etching | Peter Moll | 2004-08-24 |
| 6746880 | Method for making electrical contact with a rear side of a semiconductor substrate during its processing | Albert Birner, Martin Franosch, Volker Lehmann, Jorn Lutzen | 2004-06-08 |
| 6674113 | Trench capacitor and method for manufacturing the same | Thomas Hecht, Jorn Lutzen, Bernhard Sell | 2004-01-06 |
| 6660582 | Method of forming a vertical field-effect transistor device | Albert Birner | 2003-12-09 |
| 6620724 | Low resistivity deep trench fill for DRAM and EDRAM applications | Uwe Schroeder, Helmut Tews, Irene McStay, Manfred Hauf, Bernhard Sell +5 more | 2003-09-16 |
| 6559069 | Process for the electrochemical oxidation of a semiconductor substrate | Albert Birner | 2003-05-06 |