Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7208370 | Method for fabricating a vertical transistor in a trench, and vertical transistor | Albert Birner | 2007-04-24 |
| 7084043 | Method for forming an SOI substrate, vertical transistor and memory cell with vertical transistor | Albert Birner, Steffen Breuer, Matthias Goldbach, Dirk Schumann | 2006-08-01 |
| 6861312 | Method for fabricating a trench structure | Albert Birner, Matthias Goldbach | 2005-03-01 |