Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048811 | Method for patterning a metallization layer by reducing resist strip induced damage of the dielectric material | Frank Feustel, Thomas Werner | 2011-11-01 |
| 8039398 | Method of reducing non-uniformities during chemical mechanical polishing of excess metal in a metallization level of microstructure devices | Frank Feustel, Robert Seidel | 2011-10-18 |
| 7781329 | Reducing leakage in dielectric materials including metal regions including a metal cap layer in semiconductor devices | Axel Preusse, Markus Nopper, Thomas Ortleb | 2010-08-24 |
| 7767593 | Semiconductor device including field effect transistors laterally enclosed by interlayer dielectric material having increased intrinsic stress | Ralf Richter, Carsten Peters | 2010-08-03 |